Fabrication and optical behavior of graded-index, moth-eye anti-reflective surfaces in CdTe


A simple and scalable method, based on dip-coat colloidallithography, mask reduction, and plasma-based pattern transfer, is presented to create graded-index, moth eye-inspired antireflective features on II–VI semiconductors.Hexagonal arrays of isolated conical frusta with tunable geometry (top diameter = 200–1300 nm, pitch = 310–2530 nm, and height = 790–7100 nm) were realized by isotropic etchingof various size silica colloid masks before pattern transferinto the underlying substrate. Substantial increases in single-side direct and total infrared (IR) transmission across the 4–20 μm range (9%–15% for CdTe thin films and 18% for bulkCdTe) were achieved, in excellent agreement with transfer matrix calculations and finite difference time domain optical simulations. The fabrication method presented can be used to enhance efficiency in multiple IR application areas including photovoltaics, optical system components,detectors, and focal plane array imagers.

ICB Affiliated Authors

Chan, L., Goshal, A., DeCuir, E.A., Chen, Y.P., Morse, D.E. and Gordon, M.J.
Peer-Reviewed Article
Journal of Vacuum Science & Technology B